U-shape heater

What is U-shape herter?

U-shape is shown in below figures. Its lead pattern has U-shape, but also heater has twin elements. Therefore its patterning resolution became 2 time higher!

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Why does Toshiba propose U-shape heater ?

As there are no common pattern, so

• Minimize power loss by common drop to 10%
• Heater line is able to be located near heat sink edge
• Good MP productivity by using large ceramic mother substrate

As the pattern resolution is 2 times higher, so

• Temperature graduation is slight in a heater, so medium damage will be decrease.
• Also graininess will be improved in light density.

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